11 April 2005 00:01 [Source: ICB Americas]
Citing increased demand, Voltaix Inc. has expanded production capacity for ultra high-purity trimethylsilane (TMS) to 25 tons annually. While no timetables have been established, the company says that it is implementing plans for additional capacity to bring the total to 75 tons per year. High-purity trimethylsilane is used by integrated circuit manufacturers for depositing low-k thin-film dielectric layers, such as carbon-doped silicate glass films, by plasma-enhanced chemical vapor deposition. The improved insulation of these layers helps to increase device speed and reduce power consumption.
Earlier this month, the North Branch, N.J.-based Voltaix was awarded a global supplier quality award from BOC Edwards Electronic Materials.
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