02 May 2007 23:49 [Source: ICIS news]
HOUSTON (ICIS news)--Air Products has expanded nitrous oxide (N20) capacity at its Nanke plant in Taiwan to support the semiconductor and thin film transistor-liquid crystal display (TFT-LCD) markets in Asia, the company said on Wednesday.
The new capacity, which has been on-stream since the beginning of this year, doubles the N2O capacity and produces high purity N2O products to meet existing and potential customers’ requirements, Air Products said.
Air Products did not release the amount of the capacity expansion or its cost.
Nitrous oxide is used with silane for chemical vapour deposition of silicon nitride layers, which are typically used as a passivation, masking, or insulating layers. Another of its main applications is in the plasma deposition of fused silica glass as a low-k dielectric insulating film between adjacent metal lines.
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